OXYGEN-CONTENT OF INDIUM TIN OXIDE-FILMS FABRICATED BY REACTIVE SPUTTERING

Authors
HONDA S TSUJIMOTO A WATAMORI M OURA K
Citation
S. Honda et al., OXYGEN-CONTENT OF INDIUM TIN OXIDE-FILMS FABRICATED BY REACTIVE SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1100-1103
Citations number
19
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
1100 - 1103
Database
ISI
SICI code
0734-2101(1995)13:3<1100:OOITOF>2.0.ZU;2-V