CHARACTERIZATION OF ALUMINUM-BASED OXIDE LAYERS FORMED BY MICROWAVE PLASMA

Authors
KATZTSAMERET Z RAVEH A
Citation
Z. Katztsameret et A. Raveh, CHARACTERIZATION OF ALUMINUM-BASED OXIDE LAYERS FORMED BY MICROWAVE PLASMA, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1121-1127
Citations number
38
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
13
Issue
3
Year of publication
1995
Part
1
Pages
1121 - 1127
Database
ISI
SICI code
0734-2101(1995)13:3<1121:COAOLF>2.0.ZU;2-P