CMOS INTEGRATED CHEMICAL MICROSENSORS

Integrated chemical microsensors based on commercial IC technology and post-processing have a high potential as marketable products for vari ous applications. Exploring and exploiting industrial IC processes may be a viable approach to realize cost-effective microsensor products w ith added functionality. On-chip circuitry offers many benefits includ ing signal conditioning, test and interface electronics, enabling smal l, battery-powered devices. As technological starting points a capacit ive microsensor, a microcalorimeter and a mechanical microresonator ba sed on CMOS technology are presented Polymer layers deposited after th e micromachining steps enable detection and monitoring of various gase s such as alkanes or alcohols.