S. Liang et al., CONTROL OF CEO2 GROWTH BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION WITHA SPECIAL SOURCE EVAPORATOR, Journal of crystal growth, 151(3-4), 1995, pp. 359-364
Epitaxial CeO2 thin films have been grown on (100) yttria-stabilized z
irconia (YSZ) and (1 (1) over bar 02) sapphire substrates by metalorga
nic chemical vapor deposition using a new evaporation apparatus for so
urce delivery. A parametric Study of the evaporator was performed. The
substrate temperature effects on crystallinity, in-plane orientation
and surface morphology were investigated. The X-ray diffraction data s
hows the CeO2 films are (100) oriented grown on YSZ substrates when T-
s ranges from 650-750 degrees C. However on r-plane sapphire substrate
s, both the (100) and (111) oriented CeO2 growth are present as eviden
ced by X-ray diffraction. The peak intensity ratio of (111)/(100) decr
eased from 75% to 15% when the substrate temperature was increased fro
m 650 degrees C to 700 degrees C. With the use of the new evaporation
apparatus, a high deposition rate of 440 Angstrom/min was achieved wit
h a deposition efficiency of 46%. The YBa2Cu3O7-x films grown on CeO2/
YSZ and bare-YSZ substrate were compared to demonstrate that the CeO2
films grown by the new MOCVD process are a good buffer for YBa2Cu3O7-x
film deposition on YSZ substrates.