CHARACTERIZATION OF MODIFIED GLASSY-CARBON FILMS

The composition and structure of the thin conversion films at pre- and breakdown stale are investigated. The breakdown leads to a modified s tructure and composition. Raman spectra of modified films show the for mation of glassy carbon with a defined size of crystallites. A typical morphology characterized by a strong structured surface indicates thi s breakdown state. Electron diffraction patterns of the pre-breakdown state show the presence of titanium nitride, titanium carbide and tita nium oxide.