AN ELECTROTHERMAL MODEL FOR METAL-OXIDE-METAL ANTIFUSES

Authors
ZHANG GB HU CM YU PY CHIANG S ELTOUKHY S HAMDY EZ
Citation
Gb. Zhang et al., AN ELECTROTHERMAL MODEL FOR METAL-OXIDE-METAL ANTIFUSES, I.E.E.E. transactions on electron devices, 42(8), 1995, pp. 1548-1558
Citations number
24
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied
Journal title
I.E.E.E. transactions on electron devices → ACNP
ISSN journal
00189383
Volume
42
Issue
8
Year of publication
1995
Pages
1548 - 1558
Database
ISI
SICI code
0018-9383(1995)42:8<1548:AEMFMA>2.0.ZU;2-#
Abstract
In this paper, a complete electro-thermal analysis is presented for th e metal-oxide-metal antifuses. The application of the Wiedemann-Franz Law and the thin film effect on thermal and electrical conductivities of metal films were also discussed. Several key parameters for tungste n-oxide-tungsten antifuse were extracted. The reaction temperature bet ween tungsten and oxide was estimated to be around 1300 degrees C. The core resistivity was found to be around 250 mu Omega . cm. This model can be readily extended to the other metal-dielectric-metal systems.