SCALING OF POLY-ENCAPSULATED LOCOS FOR 0.35 MU-M CMOS TECHNOLOGY (VOL41, PG 56, 1994)

KENKARE PU MAZURE C HAYDEN JD PFIESTER JR KO J KIRSCH HC AJURIA SA CRABTREE P VUONG T

Pu. Kenkare et al., SCALING OF POLY-ENCAPSULATED LOCOS FOR 0.35 MU-M CMOS TECHNOLOGY (VOL41, PG 56, 1994), I.E.E.E. transactions on electron devices, 42(8), 1995, pp. 1564-1564

1

Engineering, Eletrical & Electronic","Physics, Applied

I.E.E.E. transactions on electron devices → ACNP

00189383

42

8

1995

1564 - 1564

ISI

0018-9383(1995)42:8<1564:SOPLF0>2.0.ZU;2-2