THIN-FILM SNO2 GAS SENSORS

Authors
STEINER K BOUBNOV Y GOPEL W
Citation
K. Steiner et al., THIN-FILM SNO2 GAS SENSORS, TM. Technisches Messen, 62(4), 1995, pp. 145-151
Citations number
NO
Categorie Soggetti
Instument & Instrumentation
Journal title
TM. Technisches Messen → ACNP
ISSN journal
01718096
Volume
62
Issue
4
Year of publication
1995
Pages
145 - 151
Database
ISI
SICI code
0171-8096(1995)62:4<145:TSGS>2.0.ZU;2-L
Abstract
Thin-film SnO2 gas sensors on silicon and sapphire substrates are disc ussed. Thin-film technologies offer several advantages such as low cos t of production, high yield and reliability,. Moreover, sensitive surf aces can be easily, modified by catalysts or dopants to enhance stabil ity, sensitivity, and selectivity. Advantages and disadvantages of dif ferent device structures, layer sequences and preparation methods are reviewed.