DETERMINATION OF CONTACT RESISTIVITY BY A MODIFIED COX AND STRACK METHOD IN CASE OF FINITE METAL SHEET RESISTANCE

Authors
AHMAD M GANGULI T PATIL S MAJOR S PATRO YGK ARORA BM
Citation
M. Ahmad et al., DETERMINATION OF CONTACT RESISTIVITY BY A MODIFIED COX AND STRACK METHOD IN CASE OF FINITE METAL SHEET RESISTANCE, Solid-state electronics, 38(8), 1995, pp. 1437-1440
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid-state electronics → ACNP
ISSN journal
00381101
Volume
38
Issue
8
Year of publication
1995
Pages
1437 - 1440
Database
ISI
SICI code
0038-1101(1995)38:8<1437:DOCRBA>2.0.ZU;2-Z
Abstract
This paper presents theoretical and experimental results concerning re sistance of contact metal as a source of error in the detemination of specific contact resistance of ohmic contacts to semiconductor utilisi ng Cox and Strack geometry. It is shown that a non-zero sheet resistan ce of metal overlay can significantly alter the value of effective con tact resistance.