Mx. Li et Hf. Dylla, MODELING OF WATER OUTGASSING FROM METAL-SURFACES .3.), Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(4), 1995, pp. 1872-1878
Citations number
10
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
A model of water adsorption on metal oxide layers and water outgassing
from metal surfaces has been developed. The oxide layer is assumed to
have porous structure and a pore length (l) distribution of 1/l2. Num
erical evaluation shows that the quantity of water adsorbed is logarit
hmic with time within a certain time range as experimentally observed.
The outgassing rate from surfaces with adsorbed water distributed uni
formly on the inner surfaces of individual pores is shown analytically
to be inversely proportional to time. This result is consistent with
frequently observed pumpdown curves. (C) 1995 American Vacuum Society.