MAGNETIC-FIELD IN 2-DIMENSIONAL MAGNETRONS

An equation in integral form has been derived which in principle enabl es the calculation of the magnetic field associated with any simple ma gnetron whose geometry may be regarded as being two dimensional. Some approximations are necessary in the course of the analysis but these a re not unduly restrictive. The equation is arrived at using conformal mapping techniques. It is used to find analytic expressions for the ma gnetic stream function and the magnetic field for the ''standard'' rec tangular magnetron geometry. Theoretical results are given for a comme rcial planar magnetron system. These are then compared with experiment al observations. (C) 1995 American Vacuum Society.