DEGRADATIONS IN PZT THIN-FILM CAPACITORS

Degradations in ferroelectric capacitors are categorized as DC and AC types. In memory applications, AC type degradations appears to be more serious than those of DC type. Breakdown, for example, occurs earlier under AC operation than DC. AC type degradations were reviewed and in duction period was also discussed extensively. An induction mechanism was proposed based on domain rearrangement under AC conditions. Curve fitting was demonstrated according to induction equation. It is sugges ted that the fatigue equation should be modified when induction period is considered.