OPTICAL AMMETER FOR INTEGRATED-CIRCUIT CHARACTERIZATION AND FAILURE ANALYSIS

Authors
CLAEYS W DILHAIRE S LEWIS D QUINTARD V PHAN T AUCOUTURIER JL
Citation
W. Claeys et al., OPTICAL AMMETER FOR INTEGRATED-CIRCUIT CHARACTERIZATION AND FAILURE ANALYSIS, Quality and reliability engineering international, 11(4), 1995, pp. 247-251
Citations number
2
Categorie Soggetti
Engineering
Journal title
Quality and reliability engineering international → ACNP
ISSN journal
07488017
Volume
11
Issue
4
Year of publication
1995
Pages
247 - 251
Database
ISI
SICI code
0748-8017(1995)11:4<247:OAFICA>2.0.ZU;2-W
Abstract
The current which flows through the metal semiconductor interface of a n ohmic contact produces a Peltier effect. This thermal effect has bee n optically detected and used for the development of an optical ammete r, the determination of doping type of semiconductors and the homogene ity scanning upon integrated circuits.