METALORGANIC CHEMICAL-VAPOR-DEPOSITION OF YBCO THIN-FILMS ON (100)MGO

Thin films of YBa2Cu3O7-x have been grown on stepped (100) MgO substra tes by metalorganic chemical vapor deposition. Films 100 nm thick had superconducting transition temperatures of 88 K and critical current d ensities of 2 x 10(6) A/cm(2) (measured at 77 K). The films grew via s crew dislocation mediated growth as evidenced by atomic force microsco py. At the initial stages of film growth, large holes between growth s pirals were formed. These holes enlarged as film growth continued, and film performance declined. Films 250-300 nm thick had superconducting transition temperatures of 86 K and critical current densities of 1 x 10(6) A/cm(2) (measured at 77 K).