THE INFLUENCE OF PLURAL SCATTERING ON EELS ELEMENTAL ANALYSIS

Citation
Ds. Su et al., THE INFLUENCE OF PLURAL SCATTERING ON EELS ELEMENTAL ANALYSIS, Ultramicroscopy, 59(1-4), 1995, pp. 181-190
Citations number
17
Categorie Soggetti
Microscopy
Journal title
ISSN journal
03043991
Volume
59
Issue
1-4
Year of publication
1995
Pages
181 - 190
Database
ISI
SICI code
0304-3991(1995)59:1-4<181:TIOPSO>2.0.ZU;2-J
Abstract
Measured atomic ratios show deviations from the stoichiometric ratios that increase with sample thickness. This paper confirms by calculatio n that plural scattering is responsible for this fact. The dependence on the experimental parameters like energy window and collection apert ure becomes obvious. Attempts are made to provide numerical correction factors which allow more reliable EELS determination also for thick s amples.