FORM MEASURING INSTRUMENT WITH INTERFEROM ETRIC FRINGE MAKER

Citation
J. Puder et al., FORM MEASURING INSTRUMENT WITH INTERFEROM ETRIC FRINGE MAKER, TM. Technisches Messen, 62(9), 1995, pp. 328-330
Citations number
NO
Categorie Soggetti
Instument & Instrumentation
Journal title
ISSN journal
01718096
Volume
62
Issue
9
Year of publication
1995
Pages
328 - 330
Database
ISI
SICI code
0171-8096(1995)62:9<328:FMIWIE>2.0.ZU;2-C
Abstract
The very fast parallel acquisition of measurement datas the main advan tage of CCD based measuring techniques for geometrical measurements of workpieces. Frequently, the method of projected fringes is applied. I n this paper, this method is adapted for the High-precision-range. An interferometric fringe generator produces fringes with high accuracy. With the measurement head, it is possible to determine the form and wa viness of surfaces which are nearly plane and which scatter the light sufficiently. Measurement examples are showed.