Hm. Anderson et Sb. Radovanov, DUSTY PLASMA STUDIES IN THE GASEOUS ELECTRONICS CONFERENCE REFERENCE CELL, Journal of research of the National Institute of Standards and Technology, 100(4), 1995, pp. 449-462
Particle ''dust'' in processing plasmas is of critical concern to the
semiconductor industry because of the threat particles pose to device
yield. A number of important investigations into the formation, growth
, charging, transport and consequences of particulate dust in plasmas
have been made using the Gaseous Electronics Conference Reference Cell
as the reactor test-bed. The greatest amount of work to dare has been
directed toward a better understanding of the role that electrostatic
, ion drag, neutral fluid drag and gravitational forces play in govern
ing the dynamic behavior of particle cloud motion. This has been accom
plished by using laser light scattering (LLS) techniques to track the
motion of suspended particle clouds in rf discharges. Also, statistica
l correlation's in the fluctuation of scattered laser light intensity
[dynamic laser light scattering (DLLS)] can be used to determine infer
mation about particle size, motion, and growth dynamics. These results
are reviewed, along with recent work demonstrating that charged dust
particles in a plasma can form a strongly coupled Coulomb liquid or so
lid. New results from DLSS experiments performed in the Reference Cell
are presented that show process-induced dust particles confined in an
electrostatic trap exhibit low-frequency oscillatory motion consisten
t with charge density wave (CDW) motion predicted for strongly coupled
Coulomb liquids.