ONE-DIMENSIONAL MODELING STUDIES OF THE GASEOUS ELECTRONICS CONFERENCE RF REFERENCE CELL

A review of the one-dimensional modeling studies in the literature of the Gaseous Electronics Conference (GEC) reference plasma reactor is p resented. Most of the studies are based on the fluid model description of the discharge and some utilize hybrid fluid-kinetic schemes. Both models are discussed here briefly. The models provide a basic understa nding of the discharge mechanisms and reproduce several critical disch arge features observed experimentally.