For the first time we report the observation of random telegraph signa
ls (RTS) in InAlAs/InGaAs/InP HFETs. The RTS show a clear Lorentz spec
trum in the frequency domain corresponding to deep traps with an activ
ation energy of Delta E(T) = 0.34 eV. The amplitude of the RTS is abou
t 10 mu V, which is more than could be expected by single electron tra
pping; For a theoretical explanation of the RTS, we assume a correlate
d capture and emission process, taking into account the change of the
electrostatic potential across the gate-source capacitance. Our result
s show, that the measured amplitude of the RTS can be well understood,
if the traps are located beneath the gate electrode.