The ionization damage associated with electron and X-ray irradiation o
f insulating specimens during their investigation by various technique
s (EM, AES, XPS, etc) is considered from the point of view of the Auge
r mechanism. This damage results from the Auger electron transport thr
ough the specimen and more specifically from the Auger cascade in the
excited atom. After electronic rearrangements, this cascade finally le
aves electron vacancies in the uppermost allowed states of the valence
band. It is shown that these vacancies may explain various experiment
al results such as the stimulated desorption of ionic species in halid
es and oxides as well as the atomic displacements in covalent crystals
. A possible way to quantify these effects is shown for the case of X-
ray irradiation and for the case of electron irradiation. In the two c
ases, the correlation between the microscopic mechanisms and their mac
roscopic consequences, from the point of view of charging effects, is
pointed out for the first time. Finally various positive aspects of th
ese effects are outlined. They concern some new methods of characteriz
ation and of elaboration in materials science.