Sp. Tobin et al., X-RAY-DIFFRACTION CHARACTERIZATION OF LPE HGCDTE HETEROJUNCTION PHOTODIODE MATERIAL, Journal of electronic materials, 22(8), 1993, pp. 959-966
High-resolution x-ray diffraction has been used to measure the composi
tion difference between P and N layers in HgCdTe heterojunction photod
iode material grown by liquid phase epitaxy. The composition (band gap
) difference is a critical parameter in long wavelength photodiodes be
cause it affects dark current and the formation of photocurrent collec
tion barriers. We find that symmetric 333 reflections cannot resolve t
he small composition differences of interest. However, by making use o
f the asymmetric 246 reflection, small composition differences (0.03)
can be resolved. There is good agreement between rocking curves and se
condary ion mass spectroscopy composition depth profiles, both in the
value of the composition difference and in the extent of compositional
grading in the top layer. High-resolution x-ray diffraction shows pro
mise as a nondestructive, relatively rapid technique for screening as-
grown heterojunction material for carrier collection barriers.