T. Manku et al., DRIFT HOLE MOBILITY IN STRAINED AND UNSTRAINED DOPED SI1-XGEX ALLOYS, I.E.E.E. transactions on electron devices, 40(11), 1993, pp. 1990-1996
Results of the drift hole mobility in strained and unstrained SiGe all
oys are reported for Ge fractions varying from 0 to 30 percent and dop
ing levels between 10(15)-10(19) cm-3. The mobilities are calculated t
aking into account the following scattering mechanisms: acoustic, opti
cal, alloy, and ionized-impurity scattering. The mobilities are then c
ompared with experimental results for a boron doping concentration of
2 x 10(19) cm-3. Good agreement between experimental and theoretical v
alues is obtained. The results show an increase in the mobility relati
ve to that of silicon.