Transparent conducting filMS Of In2O3 have been prepared by the electr
on beam evaporation technique (EBET) at a substrate temperature of -25
-degrees-C. As-deposited films are dark in colour. Subsequent heat tre
atment of these films in air resulted in crystallization of all films.
In order to obtain more insight into the annealing phenomenon, three
series of heat treatments were performed. The physical properties resu
lting from each series are discussed.