INFLUENCE OF ANNEALING ON EVAPORATED INDIUM OXIDE THIN-FILMS

Authors
ROZATI SM MIRZAPOUR S TAKWALE MG MARATHE BR BHIDE VG
Citation
Sm. Rozati et al., INFLUENCE OF ANNEALING ON EVAPORATED INDIUM OXIDE THIN-FILMS, Materials chemistry and physics, 36(3-4), 1994, pp. 252-255
Citations number
20
Categorie Soggetti
Material Science
Journal title
Materials chemistry and physics → ACNP
ISSN journal
02540584
Volume
36
Issue
3-4
Year of publication
1994
Pages
252 - 255
Database
ISI
SICI code
0254-0584(1994)36:3-4<252:IOAOEI>2.0.ZU;2-F
Abstract
Transparent conducting filMS Of In2O3 have been prepared by the electr on beam evaporation technique (EBET) at a substrate temperature of -25 -degrees-C. As-deposited films are dark in colour. Subsequent heat tre atment of these films in air resulted in crystallization of all films. In order to obtain more insight into the annealing phenomenon, three series of heat treatments were performed. The physical properties resu lting from each series are discussed.