PROGRESS TOWARDS QUANTITATIVE HIGH-RESOLUTION ELECTRON-MICROSCOPY

In recent years there has been a great upsurge of applications involvi ng quantitative high-resolution electron microscopy, in particular com paring experimental micrographs with image simulations for determinati on of defect structures. Emphasis has been given to the determination of experimental parameters, the utilization of slow-scan CCD cameras f or digital recording and extraction of quantitative structural and che mical information. More attention to surface cleanliness is needed to improve signal quality and the possibility of electron irradiation dam age should not be overlooked. Issues related to adoption of a reliabil ity or R-factor are briefly discussed.