INFLUENCE OF ORGANIC CONTAMINATION ON RESIST PROFILES

Authors
CZECH G LEHNER N SCHLUTER C LEPUSCHITZ T BEAUCHEMIN B SCHULZ R DARAKTCHIEV I SINKWITZ S
Citation
G. Czech et al., INFLUENCE OF ORGANIC CONTAMINATION ON RESIST PROFILES, Microelectronic engineering, 23(1-4), 1994, pp. 331-335
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
23
Issue
1-4
Year of publication
1994
Pages
331 - 335
Database
ISI
SICI code
0167-9317(1994)23:1-4<331:IOOCOR>2.0.ZU;2-0
Abstract
This paper shows a detailed investigation about organic contaminant ab sorption in conventional resist. It describes different effects depend ing on contamination type and the status of processing. Combination of organic contamination and resist bake leads to profile deformation re sulting in a ''bottle profile''. These observations demonstrate ambien t organic contamination is not only limited to chemically amplified De ep UV resists but also affect g/i-line resists.