ACTUAL PERFORMANCE DATA ON THE NEW PATTERN PLACEMENT METROLOGY TOOL LEITZ LMS-2020

Authors
ROTH KD BLASINGBANGERT C
Citation
Kd. Roth et C. Blasingbangert, ACTUAL PERFORMANCE DATA ON THE NEW PATTERN PLACEMENT METROLOGY TOOL LEITZ LMS-2020, Microelectronic engineering, 23(1-4), 1994, pp. 403-406
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
23
Issue
1-4
Year of publication
1994
Pages
403 - 406
Database
ISI
SICI code
0167-9317(1994)23:1-4<403:APDOTN>2.0.ZU;2-U
Abstract
The new pattern placement metrology tool Leitz LMS 2020 is described a nd the performance demonstrated. The short term repeatability measured on a 13x13 grid is about 12 nm. The uncertainty of the tool is determ ined to be within 25 mn. The tool is also well-suited for critical dim ension (CD) monitoring purposes. The repeatability for CD measurements is better than 10 nm.