ONE-STEP 3D SHAPING USING A GRAY-TONE MASK FOR OPTICAL AND MICROELECTRONIC APPLICATIONS

Authors
OPPLIGER Y SIXT P STAUFFER JM MAYOR JM REGNAULT P VOIRIN G
Citation
Y. Oppliger et al., ONE-STEP 3D SHAPING USING A GRAY-TONE MASK FOR OPTICAL AND MICROELECTRONIC APPLICATIONS, Microelectronic engineering, 23(1-4), 1994, pp. 449-454
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
23
Issue
1-4
Year of publication
1994
Pages
449 - 454
Database
ISI
SICI code
0167-9317(1994)23:1-4<449:O3SUAG>2.0.ZU;2-Y
Abstract
A novel approach based on the use of gray-tone masks to shape arbitrar y profiles is described. Tapered structures in thick polyimide as well as blazed gratings and Fresnel microlenses in fused silica substrates have been fabricated. The 3D shaping capability of this technology is illustrated by a high efficiency of 75% obtained for the lenses. This technology involves one appropriate mask, a photolithographic exposur e and an etching step; it is realized on conventional equipment and is therefore cost effective.