EFFECT OF VOCL2 ON THE FORMATION OF THERMAL OXIDE LAYERS ON GAAS

Authors
MITTOVA IY TOMINA EV AGAPOV BL MAKSIMOVA OV BORZAKOVA GV
Citation
Iy. Mittova et al., EFFECT OF VOCL2 ON THE FORMATION OF THERMAL OXIDE LAYERS ON GAAS, Inorganic materials, 29(6), 1993, pp. 888-892
Citations number
10
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
29
Issue
6
Year of publication
1993
Pages
888 - 892
Database
ISI
SICI code
0020-1685(1993)29:6<888:EOVOTF>2.0.ZU;2-P