We report on the growth of CdTe/MnTe and ZnTe/MnTe short-period superl
attices. The CdTe and ZnTe layers have been grown by atomic layer epit
axy technique, and a quadrupole mass spectrometer controlled molecular
beam epitaxy has been used for the MnTe layers growth. The critical t
hickness of MnTe on both CdTe and ZnTe layers has been determined by r
eflected high energy electron diffraction experiments and the structur
e of the superlattices was studied by X-ray diffraction analysis.