THE CHROMATIC IMAGE SHIFT IN SPATIALLY-RESOLVED EELS

A previously unnoticed effect that occurs in microanalysis by electron energy-loss spectrometry (EELS) in image mode has been investigated, namely the shift of the inelastic image relative to the elastic one. A method is proposed for correction of the shift in the microscope. It is shown by way of example that quantitative microanalysis with a sens itivity limit corresponding to nanometer-sized precipitates is possibl e, with full visual control of the area, when a parametric model for t he spatial distribution of elements in the specimen can be defined.