We studied the thermally induced amorphous-to-crystalline transformati
on in RF sputtered Te-Se-I films with an approximately constant Te: Se
ratio of 3:4 and with different halogen concentrations in the range 0
-20 at% I. Crystallization usually occurred via the formation and grow
th of cylindrites (two-dimensional, radially aligned polycrystalline a
ggregates) which exhibited a branched fibrillar morphology. The major
effects of the halogen on the transformation were as follows: (i) The
halogen strongly stabilized the amorphous phase. Crystallization took
place when there was substantial superheating at temperatures above 80
-degrees-C after the halogen was depleted. (ii) The halogen restricted
the cylindrite formation to a thin surface layer and dictated the det
ails of the branched morphology. (iii) In the halogenated films all th
e cylindrites appeared suddenly rather than nucleating at a constant r
ate and their density was reduced by a factor of 100.