INVESTIGATIONS ON THE 2-DIMENSIONAL NUCLEATION AND GROWTH-KINETICS OFINP VAPOR-PHASE EPITAXY

In this paper the initial stage and growth kinetics of InP vapour phas e epitaxy in the In-PH3-HCI-H-2 system have been analysed. To evaluate the two-dimensional nucleation parameters, correction due to the depe ndence of interfacial tension on the cluster size is included in the c lassical heterogeneous nucleation theory. An expression for the growth rate has been developed by following a reaction scheme in terms of de position temperature and partial pressure of constituent gas species a nd so on. A numerical analysis of our theoretical results has been mad e.