INVESTIGATION OF THE 1.20-EV PHOTOLUMINESCENCE BAND IN RAPID THERMAL ANNEALED INP

Citation
Cs. Ma et al., INVESTIGATION OF THE 1.20-EV PHOTOLUMINESCENCE BAND IN RAPID THERMAL ANNEALED INP, Journal of electronic materials, 23(5), 1994, pp. 459-464
Citations number
17
Categorie Soggetti
Engineering, Eletrical & Electronic","Material Science
ISSN journal
03615235
Volume
23
Issue
5
Year of publication
1994
Pages
459 - 464
Database
ISI
SICI code
0361-5235(1994)23:5<459:IOT1PB>2.0.ZU;2-4
Abstract
Deep level photoluminescence of rapid thermal annealed (RTA) undoped l iquid-encapsulated Czochralski InP has been studied. A band occurring at 1.20 eV, not observed in as-grown sample, became a dominant deep le vel peak after a 10-s rapid thermal annealing process. However, after high temperature or prolonged annealing, it disappeared again. Ion imp lantation by various species such as phosphorus, argon, and tin was ca rried out. The 1.20-eV band observed after RTA was found to be suppres sed by the phosphorus-implantation but enhanced by tin implantation, s uggesting that its origin may be due to the formation of phosphorus va cancy single point defect.