Cs. Ma et al., INVESTIGATION OF THE 1.20-EV PHOTOLUMINESCENCE BAND IN RAPID THERMAL ANNEALED INP, Journal of electronic materials, 23(5), 1994, pp. 459-464
Deep level photoluminescence of rapid thermal annealed (RTA) undoped l
iquid-encapsulated Czochralski InP has been studied. A band occurring
at 1.20 eV, not observed in as-grown sample, became a dominant deep le
vel peak after a 10-s rapid thermal annealing process. However, after
high temperature or prolonged annealing, it disappeared again. Ion imp
lantation by various species such as phosphorus, argon, and tin was ca
rried out. The 1.20-eV band observed after RTA was found to be suppres
sed by the phosphorus-implantation but enhanced by tin implantation, s
uggesting that its origin may be due to the formation of phosphorus va
cancy single point defect.