2-PHOTON LASER-INDUCED FLUORESCENCE MEASUREMENTS OF ABSOLUTE ATOMIC-HYDROGEN DENSITIES AND POWDER FORMATION IN A SILANE DISCHARGE

Authors
CZARNETZKI U MIYAZAKI K KAJIWARA T MURAOKA K OKADA T MAEDA M SUZUKI A MATSUDA A
Citation
U. Czarnetzki et al., 2-PHOTON LASER-INDUCED FLUORESCENCE MEASUREMENTS OF ABSOLUTE ATOMIC-HYDROGEN DENSITIES AND POWDER FORMATION IN A SILANE DISCHARGE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(3), 1994, pp. 831-834
Citations number
13
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
12
Issue
3
Year of publication
1994
Pages
831 - 834
Database
ISI
SICI code
0734-2101(1994)12:3<831:2LFMOA>2.0.ZU;2-5
Abstract
Absolute and spatially resolved hydrogen densities were measured in a silane radio frequency discharge by two-photon laser induced fluoresce nce spectroscopy. The excitation wavelength was 205 nm and the observa tion wavelength was 656 nm (Balmer alpha). Titration in a flow tube re actor was used for calibration of the detection system, enabling for t he first time the determination of reliable absolute hydrogen densitie s in a silane discharge. In addition, spontaneous as well as laser ind uced powder formation was observed.