SINGLE-CRYSTALLINE GROWTH OF LINBO3 ON LITAO3 BY SPRAY METALORGANIC CHEMICAL-VAPOR-DEPOSITION USING THE SINGLE-SOURCE PRECURSOR LINB(OET)6

Citation
Aa. Wernberg et al., SINGLE-CRYSTALLINE GROWTH OF LINBO3 ON LITAO3 BY SPRAY METALORGANIC CHEMICAL-VAPOR-DEPOSITION USING THE SINGLE-SOURCE PRECURSOR LINB(OET)6, Journal of crystal growth, 140(1-2), 1994, pp. 57-64
Citations number
45
Categorie Soggetti
Crystallography
Journal title
ISSN journal
00220248
Volume
140
Issue
1-2
Year of publication
1994
Pages
57 - 64
Database
ISI
SICI code
0022-0248(1994)140:1-2<57:SGOLOL>2.0.ZU;2-S
Abstract
Single crystal LiNbO3 has been deposited on a z-cut LiTaO3 substrate b y a spray metalorganic chemical vapor deposition (MOCVD) process using the single source precursor LiNb(OEt)6. The surface morphology of the film has been characterized by scanning electron microscopy and its s ingle crystal quality was established by X-ray diffraction (theta-2the ta scans, rocking curve measurements and pole figure analysis) and Rut herford backscattering spectrometry combined with ion channeling.