THE EFFECT OF WCL6 ON THE FORMATION OF THERMALLY OXIDIZED LAYERS ON GAAS

Authors
MITTOVA IY TOMINA EV SVIRIDOVA VV
Citation
Iy. Mittova et al., THE EFFECT OF WCL6 ON THE FORMATION OF THERMALLY OXIDIZED LAYERS ON GAAS, Inorganic materials, 30(5), 1994, pp. 567-570
Citations number
13
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
30
Issue
5
Year of publication
1994
Pages
567 - 570
Database
ISI
SICI code
0020-1685(1994)30:5<567:TEOWOT>2.0.ZU;2-0