We report on molecular beam epitaxy and hot-wall beam epitaxy growth o
f ZnTe epilayers on (001) GaAs substrates. The surface reconstruction
of (001) ZnTe is measured by reflection high-energy electron diffracti
on (RHEED). The RHEED pattern as a function of the beam equivalent pre
ssure ratio P(Te)/P(Zn) and substrate temperature is studied. Mosaic s
tructures of the ZnTe epilayers grown under optimized conditions are i
nvestigated quantitatively by high resolution X-ray diffraction and ph
otoluminescence. These data, which are related to the three-dimensiona
l perfection of epilayers, are contrasted to RHEED measurements of the
surface morphology.