HELIUM GAS MIXING IN NITROGEN PLASMA FOR THE CONTROL OF THE ACCEPTOR CONCENTRATION IN P-ZNSE

Nitrogen and helium mixed gas plasma was used to control the acceptor concentration of p-ZnSe and p-ZnSSe. Using the mixed gas, the acceptor concentration of p-ZnSe can be controlled from 6 X 10(16) to 7 X 10(1 7) cm-3, whereas the acceptor concentration of p-ZnSSe can be controll ed from 4 X 10(16) to 4 X 10(17) cm-3 . Doping characteristics such as the acceptor concentration and the PL properties depend on the gas mi xing ratio and the RF power. p-Layers grown with this technique were u sed for blue-green laser diode structures. Lasing was observed at 77 K under pulsed operation.