Chemical kinetics of the laser pyrolysis of Si(CH3)2Cl2 was studied at
pressures of 135, 107 and 84 torr using 1 to 4 W laser radiation (488
nm). The gaseous products were H-2 and HCl; also black cylindrical ro
ds SiC(x) (X=0.3 to 1.2) were deposited. The decomposition of Si(CH3)2
Cl2 was found to be a first order reaction. The rate constants of the
decomposition of Si(CH3)2Cl2 and the rate constants of formation of H-
2 and HCl were measured. Activation energy was estimated to be 44.3 kJ
mol-1. The initial reaction in this laser pyrolysis removes H-2 and H
CI from Si(CH3)2Cl2. A model for this pyrolysis was suggested. Many pa
rameters were calculated to illustrate the detailed picture of the pyr
olysis.