MULTIELEMENT CHARACTERIZATION OF SILICON-NITRIDE POWDERS BY ATOMIC AND MASS-SPECTROMETRIC SOLUTION METHODS

A sample pretreatment technique for silicon nitride involving digestio n and matrix/traces separation was developed by means of radiotracers and applied to analysis of this material by inductively coupled plasma atomic emission spectrometry, inductively coupled plasma mass spectro metry and graphite furnace atomic absorption spectrometry. The results obtained for a high purity silicon nitride material by these methods are compared each with the other and with those obtained by neutron ac tivation analysis. The limits of detection and the capabilities of the methods are compared and discussed.