THE MEASUREMENT AND UNCERTAINTY OF A CALIBRATION STANDARD FOR THE SCANNING ELECTRON-MICROSCOPE

Authors
FU J CROARKIN MC VORBURGER TV
Citation
J. Fu et al., THE MEASUREMENT AND UNCERTAINTY OF A CALIBRATION STANDARD FOR THE SCANNING ELECTRON-MICROSCOPE, Journal of research of the National Institute of Standards and Technology, 99(2), 1994, pp. 191-199
Citations number
17
Categorie Soggetti
Engineering
Journal title
Journal of research of the National Institute of Standards and Technology → ACNP
ISSN journal
1044677X
Volume
99
Issue
2
Year of publication
1994
Pages
191 - 199
Database
ISI
SICI code
1044-677X(1994)99:2<191:TMAUOA>2.0.ZU;2-B
Abstract
Standard Reference Material 484 is an artifact for calibrating the mag nification scale of a Scanning Electron Microscope (SEM) within the ra nge of 1000 x to 2000O x. Seven issues, SRM484, and SRM-484a to SRM-48 4f, have been certified between 1977 and 1992. This publication docume nts the instrumentation, measurement procedures and determination of u ncertainty for SRM484 and illustrates with data from issues 484e and 4 84f.