OPTICAL CHARACTERIZATION OF THIN-FILM BENZOCYCLOBUTENE (BCB) BASED POLYMERS

Authors
BEECHINOR JT MCGLYNN E OREILLY M CREAN GM
Citation
Jt. Beechinor et al., OPTICAL CHARACTERIZATION OF THIN-FILM BENZOCYCLOBUTENE (BCB) BASED POLYMERS, Microelectronic engineering, 33(1-4), 1997, pp. 363-368
Citations number
9
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
33
Issue
1-4
Year of publication
1997
Pages
363 - 368
Database
ISI
SICI code
0167-9317(1997)33:1-4<363:OCOTB(>2.0.ZU;2-G
Abstract
Optical properties of benzocyclobutene (BCB)-based polymer films depos ited on Si are characterised using variable angle spectroscopic ellips ometry (VASE) as a function of spin and cure parameters. Thicknesses e xtracted from VASE are correlated to scanning electron microscopy (SEM ) analysis. The extent of cure and heat Bow characteristics of these f ilms as a function of process parameters are extracted from Fourier tr ansform infra-red (FTIR) and differential scanning calorimetry (DSC) m easurements.