Jp. Contour et al., HOMOEPITAXIAL GROWTH OF LOW ROUGHNESS SRTIO3 BY PULSED-LASER DEPOSITION - APPLICATION TO YBA2CU3O7-X-BASED THIN-FILMS AND SUPERLATTICES, Journal of crystal growth, 141(1-2), 1994, pp. 141-149
YBa2Cu3O7 thin films and YBa2Cu3O7-based insulator/superconductor supe
rlattices have been grown by pulsed laser deposition on homoepitaxial
SrTiO3 buffer layer. The SrTiO3 buffer layer decreases the substrate r
oughness, improving the epitaxial relation of the YBa2Cu3O7 layer or Y
Ba2Cu3O7/PrBa2Cu3-xGaxO7 superlattices with the substrate, as shown by
Rutherford backscattering spectrometry in channelled geometry and RHE
ED analyses performed at the end of the growth. However, this does not
result in a significant smoothness improvement of the YBa2Cu3O7 film
measured by atomic force microscopy. The X-ray diffraction patterns re
corded from YBa2Cu3O7/SrTiO3 superlattice structures show only +/-1 sa
tellite around the (100) reflection line. The poor quality of the supe
rlattice is attributed to the SrTiO3 regrowth mechanisms over YBa2Cu3O
7 which develop a high roughness into the YBa2Cu3O7/SrTiO3 inverse int
erface, although the SIMS in-depth profiles show a perfect chemical pe
riodicity while the growth temperature is lower than 710-degrees-C.