MONTE-CARLO CORRECTION PROGRAM FOR PC

A Monte Carlo correction program for quantitative microanalysis on PC computer is introduced in this paper. The elastic scattering is descri bed by the screened Rutherford cross section. Instead of computing the energy loss according to the actual path between two scatterings we h ave defined the ''Bethe inelastic cross section'' determined by the Be the-slowing-down approximation. It is assumed that it causes no angula r departure of the scattered electron. In the second model we took int o account the angular dependence of inelastic scattering assuming that the primary electron interacts with quasi-free atom electrons. On the basis of these two models analytical Monte Carlo programmes were deve loped and experimentally tested on some oxide glass. Our results are f ully comparable to those obtained by ten world microprobe laboratories using classical ZAF correction or Bence-Albee methods. We have found that introducing angular part of the inelastic cross section analytica l results did not significantly change. All of our results were carrie d out for bulk specimens but extending it to layers is under the devel opment.