SURFACE CLEANING WITH THE CARBON-DIOXIDE SNOW JET

Surface cleaning using a carbon dioxide snow jet incorporates a high-v elocity stream of small dry ice particles and gas which is directed to wards a contaminated surface. The resulting interactions between the s now particles and surface contamination lead to particulate and hydroc arbon removal. Past work has demonstrated removal of micron and submic ron particles and also hydrocarbon and silicone-based stains from many different samples including Si, GaAs, InP wafers, metals, ceramics, U HV components, glass, optical components, and electronic devices. Seve ral typical applications and examples are discussed along with the exp erimental parameters for effective carbon dioxide snow cleaning. The a bove results supports previous findings that carbon dioxide snow clean ing is nondestructive, nonabrasive, and residue-free, thus making this cleaning procedure acceptable for many critical cleaning applications .