GROWTH OF THIN FI FILMS ON W(110) AND O W(110)/

Citation
Gs. Herman et Chf. Peden, GROWTH OF THIN FI FILMS ON W(110) AND O W(110)/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 2087-2090
Citations number
14
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
ISSN journal
07342101
Volume
12
Issue
4
Year of publication
1994
Part
2
Pages
2087 - 2090
Database
ISI
SICI code
0734-2101(1994)12:4<2087:GOTFFO>2.0.ZU;2-K
Abstract
The interaction of ultrathin Ti films grown on clean and oxidized W(11 0) has been studied by Auger electron spectroscopy and thermal desorpt ion. Auger electron spectroscopy indicates layer-by-layer growth of Ti on both of these substrates. For annealing temperatures up to 1100 K, two-monolayer Ti films are stable on the clean and oxidized W surface s. Above these coverages, the films are unstable after annealing to 11 00 K, although this temperature is lower than Ti desorption. Diffusion of oxygen to the Ti surface is also observed for the oxidized surface . Thermal desorption data show distinct Ti monolayer and multilayer fe atures for Ti from the clean surface at coverages greater than one mon olayer. A more complex desorption behavior is observed for Ti on the o xidized surface.