In this paper a detailed charge control analysis is presented for a ME
SFET and a MODFET to show how the various capacitances associated with
the region under the gate contact influence device performance. Where
necessary, an exact description of electron confinement is included i
n the solution scheme by solving the effective mass Schrodinger equati
on for a single band and within a self-consistent framework. In the ca
se of the MESFET, the analysis shows that the filling of donor impurit
y states, which are coincident in real space with the conducting chann
el, gives rise to a large parasitic capacitance which severely degrade
s both the intrinsic transconductance and cutoff frequency performance
. In the case of the MODFET, the separation of the donor impurity leve
l in real space from the conducting channel, and in energy from the Fe
rmi-level, results in a low parasitic capacitance over the whole opera
ting region of the device. Thus it is shown that the MODFET appears to
be more suited to millimeter-wave applications, regardless of any ele
ctron transport effects.