Sp. Fusselman et Hk. Yasuda, PARTICLE DENSITIES AND NONEQUILIBRIUM IN A LOW-PRESSURE ARGON PLASMA-JET, Plasma chemistry and plasma processing, 14(3), 1994, pp. 251-275
Plasma diagnostic techniques have been employed to determine particle
densities and temperatures in a low-pressure argon plasma jet generate
d by a cascade arc. These measurements allow characterization of the e
xtent to which the plasma jet deviates from thermodynamic equilibrium
and provide a basis for predicting how reactive gases will interact wi
th the excited and ionized species in the plasma jet. It was found tha
t the distribution of atomic states in the plasma jet is not adequatel
y described by either local thermodynamic equilibrium (LTE) or partial
local thermodynamic equilibrium (pLTE), and the jet was optically thi
ck for 3p-->4s transitions across the jet radius. Excited argon neutra
ls outnumber ions by a large ratio, and dominate subsequent dissociati
on/excitation phenomena. The rate of methane destruction in the plasma
jet shows that estimates for particle densities, temperature, and jet
velocity are self-consistent.