MAPPING OF 2-DIMENSIONAL LATTICE-DISTORTIONS IN SILICON-CRYSTALS AT SUBMICROMETER RESOLUTION FROM X-RAY ROCKING-CURVE DATA (VOL 27, PG 33881994)

Citation
Ay. Nikulin et al., MAPPING OF 2-DIMENSIONAL LATTICE-DISTORTIONS IN SILICON-CRYSTALS AT SUBMICROMETER RESOLUTION FROM X-RAY ROCKING-CURVE DATA (VOL 27, PG 33881994), Journal of applied crystallography, 27, 1994, pp. 647-649
Citations number
1
Categorie Soggetti
Crystallography
ISSN journal
00218898
Volume
27
Year of publication
1994
Part
4
Pages
647 - 649
Database
ISI
SICI code
0021-8898(1994)27:<647:MO2LIS>2.0.ZU;2-B
Abstract
In the paper by Nikulin, Sakata, Hashizume & Petrashen [J. Appl. Cryst . (1994), 27, 338-344], the lateral resolution in the two-dimensional maps was evaluated incorrectly. The correct value should be calculated from the full angular range of an individual transverse scan, which g ives 0.325 mum in the experimental condition described, one half the o ld value.