MULTIPHASE HOMODYNE DISPLACEMENT SENSOR

Citation
V. Greco et al., MULTIPHASE HOMODYNE DISPLACEMENT SENSOR, Optik, 97(1), 1994, pp. 15-18
Citations number
12
Categorie Soggetti
Optics
Journal title
OptikACNP
ISSN journal
00304026
Volume
97
Issue
1
Year of publication
1994
Pages
15 - 18
Database
ISI
SICI code
0030-4026(1994)97:1<15:MHDS>2.0.ZU;2-Z
Abstract
A four-channel homodyne interferometer is presented in which the phase is precisely detected to monitor the displacement of a test mirror wi th sub-nanometric accuracy. The optical configuration is of the Twyman -Green type, with a structured delay plate in one arm. The principle o f operation and the measuring algorithm are described, and experimenta l results are presented.